JPH069352Y2 - 半導体圧力変換器 - Google Patents
半導体圧力変換器Info
- Publication number
- JPH069352Y2 JPH069352Y2 JP1988000537U JP53788U JPH069352Y2 JP H069352 Y2 JPH069352 Y2 JP H069352Y2 JP 1988000537 U JP1988000537 U JP 1988000537U JP 53788 U JP53788 U JP 53788U JP H069352 Y2 JPH069352 Y2 JP H069352Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cover
- semiconductor pressure
- pressure
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 26
- 239000000758 substrate Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988000537U JPH069352Y2 (ja) | 1988-01-08 | 1988-01-08 | 半導体圧力変換器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988000537U JPH069352Y2 (ja) | 1988-01-08 | 1988-01-08 | 半導体圧力変換器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01105836U JPH01105836U (en]) | 1989-07-17 |
| JPH069352Y2 true JPH069352Y2 (ja) | 1994-03-09 |
Family
ID=31199655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988000537U Expired - Lifetime JPH069352Y2 (ja) | 1988-01-08 | 1988-01-08 | 半導体圧力変換器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069352Y2 (en]) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5139553B2 (en]) * | 1971-11-29 | 1976-10-28 | ||
| JPS55137565U (en]) * | 1979-03-20 | 1980-09-30 |
-
1988
- 1988-01-08 JP JP1988000537U patent/JPH069352Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01105836U (en]) | 1989-07-17 |
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